Title:
可変容量素子及びその製造方法、並びに、その静電容量設定方法
Document Type and Number:
Japanese Patent JP5325893
Kind Code:
B2
Inventors:
Norio Nakazato
Nobuo Fujieda
Masayoshi Ishibashi
Mitori Kato
Nobuo Fujieda
Masayoshi Ishibashi
Mitori Kato
Application Number:
JP2010537615A
Publication Date:
October 23, 2013
Filing Date:
November 12, 2008
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01G5/16; H01G5/00; H01G5/18
Domestic Patent References:
| JPH0620874A | 1994-01-28 | |||
| JP2005259488A | 2005-09-22 |
Attorney, Agent or Firm:
Polaire Patent Business Corporation