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Title:
VARIABLE CAPACITANCE ELEMENT
Document Type and Number:
Japanese Patent JP2006303219
Kind Code:
A
Abstract:

To provide a variable capacitive element capable of obtaining a big capacitance change rate, even when a part of a capacitive electrode 30 is constituted of a relatively easily oxidizable metal, in the variable capacitive element having a capacitive electrode 30 on a ferroelectric thin film 20.

The ferroelectric thin film 20 has a perovskite structure, represented by general Formula AXBO3. In the general Formula, A includes at least one kind selected from among Ba, Sr and Ca, and in the general Formula, B contains at least one kind selected from among Ti, Zr, Sn and Hf, and X satisfies 0.85≤X≤0.90.


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Inventors:
NAKAISO TOSHIYUKI
Application Number:
JP2005123455A
Publication Date:
November 02, 2006
Filing Date:
April 21, 2005
Export Citation:
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Assignee:
MURATA MANUFACTURING CO
International Classes:
H01G7/06; H01G4/12; H01G4/33; H01L21/822; H01L27/04
Domestic Patent References:
JP2002329640A2002-11-15
JP2004207630A2004-07-22
JP2001342572A2001-12-14
JP2005005450A2005-01-06
JPH0717713A1995-01-20
JP2003063860A2003-03-05
JP2003298027A2003-10-17



 
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