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Title:
VARIABLE CAPACITANCE ELEMENT
Document Type and Number:
Japanese Patent JP2010177278
Kind Code:
A
Abstract:

To provide a variable capacitance element which operates even at high temperature.

The variable capacitance element has a diamond semiconductor 2, a first metal electrode 3, a first insulating film 4, and a second metal electrode 5, formed on an upper side of a substrate 1, wherein the diamond semiconductor is formed of a high-density doped diamond semiconductor 22 of ≥2×1020 cm-3 in dopant density and a low-density doped diamond semiconductor 21 of ≤5×1017 cm-3 in dopant density in order from the substrate side, the high-density diamond semiconductor 22 and first metal electrode 3 are electrically connected to each other, and the first insulating film 4 is interposed between the low-density diamond semiconductor 21 and second metal electrode 5.


Inventors:
Teramae, Yumi
Yokota, Yoshihiro
Kawakami, Nobuyuki
Hirano, Takayuki
Tachibana, Takeshi
Application Number:
JP2009000015666
Publication Date:
August 12, 2010
Filing Date:
January 27, 2009
Export Citation:
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Assignee:
KOBE STEEL LTD
International Classes:
H01G7/06
Domestic Patent References:
JPH07500457A
JP2004207272A
JPH08316498A
JP2006303389A
Attorney, Agent or Firm:
植木 久一
菅河 忠志
二口 治
伊藤 浩彰
植木 久彦
竹岡 明美