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Title:
MEMS構造に基づく可変キャパシタ
Document Type and Number:
Japanese Patent JP7443626
Kind Code:
B2
Abstract:
An MEMS structure-based adjustable capacitor is provided, comprising: a lower plate A, a movable plate B, an upper plate C, a fixed apparatus D and one or more connecting wire conductors E; a lower end of the fixed apparatus D is fixedly connected to the lower plate A, an upper end of the fixed apparatus D is fixedly connected to the upper plate C, a structure B4 which is able to move freely in parallel in cooperation with the fixed apparatus D is provided at a middle part of movable plate B, the movable plate B is fixed at a middle part of the fixed apparatus D by means of the structure B4, and the movable plate B is able to move up and down along the fixed apparatus D; the lower plate A is provided with a lower electrode A1, and the movable plate B is provided with a movable electrode B1 and adjustment electrodes B2; the lower electrode A1 and the movable electrode B1 constitute a unit capacitor; and the upper plate C is provided with an upper electrode C1 and adjustment electrodes C2. The adjustable capacitor not only has a high Q value, but also has high voltage withstand and current withstand capabilities.

Inventors:
Mengyeongnam
Application Number:
JP2023512259A
Publication Date:
March 05, 2024
Filing Date:
August 24, 2020
Export Citation:
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Assignee:
Kouyuan Technology (Hong Kong) Co., Ltd.
Acura Electronic Technologies Private Limited
AKLUA TECHNOLOGY INC.
Acura Communication Electronic Company Private Limited
International Classes:
H01G5/16; B81B3/00; H01G5/01; H01G5/011
Domestic Patent References:
JP2009253155A
JP2003282359A
Foreign References:
US20060171097
Other References:
西元琢真、山下喜市、大畠賢一,CS2-1 低電圧駆動・広ダイナミックレンジMEMS可変キャパシタ,電子情報通信学会2007年総合大会講演論文集 エレクトロニクス1,日本,社団法人電子情報通信学会,2007年03月07日,S-29
Attorney, Agent or Firm:
Hiroki Shirai