Title:
VARIABLE CAPACITOR AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH11233799
Kind Code:
A
Abstract:
To provide a variable capacitor having a wide capacitance range against a narrow voltage range.
A variable voltage capacitor 10 manufactured on a semiconductor substrate 11 incorporates a gate structure 62 and a well 22 underlying the structure 62. A buried layer 15 doped at a high concentration and a contact area 31 doped at a high concentration in the substrate 11 form a low-resistance conducting path from the well 22 to the surface 17 of the substrate 11. The variable voltage capacitor 10 is constructed by using a multi-finger layout. When the voltage applied across the capacitor 10 changes during operation, the width of a depletion area in the well 22 changes and, accordingly, the capacitance of the capacitor 10 also changes.
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Inventors:
DAVID LEWIS STOLFA
KENNETH D CORNET
KENNETH D CORNET
Application Number:
JP25930398A
Publication Date:
August 27, 1999
Filing Date:
August 28, 1998
Export Citation:
Assignee:
MOTOROLA INC
International Classes:
H01L27/04; H01L21/822; H01L29/94; (IPC1-7): H01L29/94; H01L27/04; H01L21/822
Domestic Patent References:
JPH065794A | 1994-01-14 | |||
JPH03192758A | 1991-08-22 | |||
JPH0477265U | 1992-07-06 | |||
JPH0477266U | 1992-07-06 |
Attorney, Agent or Firm:
Shinsuke Onuki (1 person outside)
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