Title:
可変コンデンサ及びプラズマ処理装置
Document Type and Number:
Japanese Patent JP7448769
Kind Code:
B2
Abstract:
To provide a variable capacitor that allows fine adjustment of reactance.SOLUTION: A variable capacitor 13 includes fixed electrodes 16 and 17, and a movable electrode 18 forming a capacitor between the fixed electrodes, and the movable electrode moves to change an area facing the fixed electrode and change the capacitance. At least one of the fixed electrode and the movable electrode is configured such that the change characteristics of the facing area becomes convex upward when the mobility of the movable electrode is increased from a state in which the facing area is minimized.SELECTED DRAWING: Figure 7
More Like This:
| JPH02106012 | VARIABLE CAPACITOR |
| JP2008085139 | TRIMMING CAPACITOR AND METHOD FOR MANUFACTURING TRIMMING CAPACITOR |
Inventors:
Mitsuo Ibaraki
Kiyoshi Kubota
Shigeaki Kishida
Kiyoshi Kubota
Shigeaki Kishida
Application Number:
JP2019113170A
Publication Date:
March 13, 2024
Filing Date:
June 18, 2019
Export Citation:
Assignee:
Nissin Electric Co., Ltd.
International Classes:
H01G5/013; C23C16/505; H05H1/46
Domestic Patent References:
| JP10233338A | ||||
| JP6052134U | ||||
| JP54096761A |
Foreign References:
| WO2019107540A1 | ||||
| US3588641 |
Attorney, Agent or Firm:
Ryuhei Nishimura
Shindai Saito
Yoshinaga Uemura
Atsushi Nakamura
Haruko Maeda
Shindai Saito
Yoshinaga Uemura
Atsushi Nakamura
Haruko Maeda