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Patent Searching and Data


Title:
VARIABLE CAPACITY CAPACITOR AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2002329641
Kind Code:
A
Abstract:

To provide a variable capacitor that has an extremely small number of lattice defects in oxygen in the entire dielectric layer, and hence has an extremely small amount of dielectric loss, and to provide the manufacturing method of the variable capacitor.

In the variable capacity capacitor where a lower electrode layer 2, a dielectric layer 3 where a dielectric rate changes by applying an external control voltage, and an upper electrode layer 4 are deposited successively, the dielectric layer 3 is made of a Perovskite type oxide crystal particle containing at least Ba, Sr, and Ti, and the crystal particle is oriented randomly without being oriented in a specific direction. In addition, when the dielectric layer 3 is to be formed, an amorphous dielectric layer is formed on a ground dielectric layer 2 that is orientated in (110) at an extremely low temperature, and then is heat-treated to manufacture the variable capacity capacitor.


Inventors:
MISHIMA TSUNEO
Application Number:
JP2001131683A
Publication Date:
November 15, 2002
Filing Date:
April 27, 2001
Export Citation:
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Assignee:
KYOCERA CORP
International Classes:
H01G7/06; H01L29/93; (IPC1-7): H01G7/06; H01L29/93