Title:
屈折力の監視を行う可変焦点距離レンズシステム
Document Type and Number:
Japanese Patent JP7203552
Kind Code:
B2
Abstract:
A variable focal length (VFL) lens system is provided including a VFL lens, a VFL lens controller, an objective lens, a camera and an optical power monitoring configuration. During a standard workpiece imaging mode, the objective lens transmits workpiece light along an imaging optical path through the VFL lens to the camera, which provides a corresponding workpiece image exposure. During an optical power monitoring mode, the optical power monitoring configuration produces a monitored beam pattern which travels along at least a portion of the imaging optical path through the VFL lens to the camera, which provides a monitoring image exposure. Different monitoring image exposures are acquired at different phase timings of the periodic modulation of the VFL lens, and a dimension of the monitored beam pattern is measured in each monitoring image exposure as related to an optical power of the VFL lens at the corresponding phase timing.
Inventors:
Paul Gerrard Gradonic
Robert Carmil Brill
Robert Carmil Brill
Application Number:
JP2018185679A
Publication Date:
January 13, 2023
Filing Date:
September 28, 2018
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G02B21/00; G02B3/14; G02B7/28; G02B21/36
Domestic Patent References:
| JP2017223651A | ||||
| JP2018077461A | ||||
| JP2015104136A | ||||
| JP2006145793A |
Foreign References:
| US9736355 | ||||
| US20150042992 | ||||
| CN108627141A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
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