To provide a stabilized variable phase shift circuit exhibiting excellent withstand power and low loss in which waveform distortion and intermodulation distortion are suppressed.
In the variable phase shift circuit P having a transmission line or a circulator where a variable capacity capacitor is connected with the ground side of the transmission line or the ground side terminal of the circulator, the variable capacity capacitor Ct comprises a plurality of variable capacity elements C1-C5 employing a thin film dielectric layer having a dielectric constant dependent on the applying voltage and connected between the input terminal and the output terminal in parallel in DC sense but in series in AC sense. Phase shift amount can be maximized by utilizing capacity variation rate of the variable capacity capacitor Ct by a bias signal to the maximum resulting in a stabilized variable phase shift circuit P exhibiting excellent withstand power and low loss even for high frequencies in which waveform distortion and intermodulation distortion are suppressed.