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Title:
VARIABLE RESISTOR FOR NONVOLATILE MEMORY AND ITS MANUFACTURING METHOD, AND NONVOLATILE MEMORY
Document Type and Number:
Japanese Patent JP2015065459
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide: a variable resistor for a nonvolatile memory whose manufacturing processes can be reduced; its manufacturing method; and a nonvolatile memory.SOLUTION: A variable resistor includes a variable resistance layer 14 provided on the surface of a first wiring layer 12, an interlayer dielectric 20 provided on the first wiring layer 12, and a plug metal 23 provided in the interlayer dielectric 20 and connected to the variable resistance layer 14. The variable resistor is formed with one layer of the interlayer dielectric.

Inventors:
HAYAKAWA YUKIO
Application Number:
JP2014233157A
Publication Date:
April 09, 2015
Filing Date:
November 17, 2014
Export Citation:
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Assignee:
SPANSION LLC
International Classes:
H01L27/105; H01L45/00; H01L49/00
Domestic Patent References:
JP2007214565A2007-08-23
JP2007180473A2007-07-12
JP2006344976A2006-12-21
JP2007067403A2007-03-15
JP2007027537A2007-02-01
Foreign References:
WO2007125674A12007-11-08
US20070184613A12007-08-09
US20090200640A12009-08-13
US20060284159A12006-12-21
US20070045606A12007-03-01
EP1816682A22007-08-08
WO2007102341A12007-09-13
US20100225438A12010-09-09
WO2007021913A12007-02-22
Attorney, Agent or Firm:
稲葉 良幸
大貫 敏史
江口 昭彦
内藤 和彦