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Title:
VARIABLE VOLTAGE CAPACITOR WITH IMPROVED C-V LINEARITY
Document Type and Number:
Japanese Patent JP2001210550
Kind Code:
A
Abstract:

To provide a variable voltage capacitor having improved C-V linearity.

This variable voltage capacitor contains a support board 41 having a doped layer 42, which has a insulating layer 45 on it, first, second and third capacitors 47, 49, and 51 which is defined by first, second, and third conductor segments 46, 48, 50 is paralell with the doped layer and across form it by the insulating layer. The first, the second, and the third segments work as external contacts, a terminal opposite to the first, second, and third capacitor is respectively connected via the doped layer. A suitable example is one where the board is a semiconductor wafer, doped layer is grown, epitaxially, the insulating material is of high permittivity such as zirconium titanate or similar to it, and the segment is gold.


Inventors:
PASTOR RICKEY G
ZHAO LEI
Application Number:
JP2000383161A
Publication Date:
August 03, 2001
Filing Date:
December 18, 2000
Export Citation:
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Assignee:
MOTOROLA INC
International Classes:
H01G7/06; H01L21/822; H01L27/04; H01L27/08; H01L29/00; (IPC1-7): H01G7/06; H01L21/822; H01L27/04
Domestic Patent References:
JPH1093050A1998-04-10
JPH07500457A1995-01-12
JPH11233799A1999-08-27
JPH05218304A1993-08-27
JPH06502967A1994-03-31
Attorney, Agent or Firm:
Shinsuke Onuki (1 person outside)



 
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