Title:
VERTICAL CONVERYER IN CLEAN ROOM
Document Type and Number:
Japanese Patent JP3119551
Kind Code:
B
Abstract:
PURPOSE: To avoid dust produced by the air stream turbulence in an opening through which products are delivered and the opening/shutting of a door.
CONSTITUTION: Normally-open fire-proof doors 1a and 1b which are closed only in an emergency and automatic doors 2a and 2b which are opened only when products are delivered are attached doubly to the product delivery openings 8a and 8b of a vertical shaft 7 which is composed of fire-proof walls. With this constitution, it is not necessary to open and close the fire-proof every time of delivery, so that the turbulence of an air stream in a clean room can be avoided and dust can be suppressed.
Inventors:
Fujimoto, Hiroaki
Application Number:
JP1993000318627
Publication Date:
October 13, 2000
Filing Date:
December 17, 1993
Export Citation:
Assignee:
NEC YAMAGUCHI LTD
International Classes:
B65G49/07; B65G35/00; F24F7/06; H01L21/677; H01L21/68; B65G49/07; B65G35/00; F24F7/06; H01L21/67; (IPC1-7): H01L21/68; B65G49/07