PURPOSE: To drive a table vertically without a time delay by mounting a voice coil to the table while being positioned in the magnetic field of a permanent magnet and conducting the voice coil.

CONSTITUTION: A mask 1, a table 2, small holes 3 and a vacuum hose 4 are manufactured and arranged in the same manner as conventional devices. A voice coil 6 is fixed vertically to the lower surface of the table 2, and releasably supported movably in the direction of an axis while being crossed at right angles with the magnetic field of a permanent magnet 7. A wafer 5 is sucked onto the table 2 under a vacuum, and the voice coil is conducted. The coil 6 is driven vertically by the direction of conduction, driving force is accurately proportional to a conduction current value, and the variation of driving force quickly responds to a current change, and delay may be regarded as zero on practical precision.