Title:
VERTICAL HEAT TREATMENT APPARATUS AND SUBSTRATE RETENTION TOOL FIXING MEMBER FOR VERTICAL HEAT TREATMENT
Document Type and Number:
Japanese Patent JP3378241
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a vertical heat treatment apparatus that can prevent a substrate retention tool from falling down not only during standby and loading and unloading into a reaction pipe, but also during treatment in the reaction pipe, and to provide a substrate retention tool fixing member for vertical heat treatment.
SOLUTION: In the vertical heat treatment apparatus 1, a convex section 35 and a projection 36 on a baseplate 32 of wafer boat 30 are fitted to a convex hole section 47 and a groove 48 on a top board 41 of a heat-insulating cylinder 40, respectively. Then, from the side of the baseplate 32 of the wafer boat 40, a threaded member 51 is inserted into a threaded member insertion hole 58 of a heat-insulating cylinder insertion member 53 that is nearly horizontally inserted between supports 43 of the heat-insulating cylinder 40. Additionally, the threaded member 51 that is inserted into the threaded member insertion hole 58 is inserted into a tapped member 52 for screwing to the tapped member 52, thus detachably fixing the wafer boat 30 to the heat-insulating cylinder 40.
Inventors:
Katsuyuki Hishiya
Kazuyuki Sugawara
Katsuya Toba
▲高▼橋 喜一
Mitsuru Kohara
Kazuyuki Sugawara
Katsuya Toba
▲高▼橋 喜一
Mitsuru Kohara
Application Number:
JP2001253410A
Publication Date:
February 17, 2003
Filing Date:
August 23, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/44; C23C16/46; F27B5/06; F27D5/00; H01L21/205; H01L21/22; H01L21/31; H01L21/68; H01L21/683; (IPC1-7): H01L21/22; C23C16/44; C23C16/46; F27B5/06; F27D5/00; H01L21/205; H01L21/31; H01L21/68
Domestic Patent References:
| JP1174205A | ||||
| JP5218186A |
Attorney, Agent or Firm:
Saichi Suyama