Title:
縦型熱処理装置及びその低温域温度収束方法
Document Type and Number:
Japanese Patent JP4642349
Kind Code:
B2
Abstract:
A vertical heat processing apparatus includes a process chamber ( 5 ) defining a process field (A 1 ) configured to accommodate a plurality of target substrates (W) supported at intervals in a vertical direction. The apparatus further includes a heating furnace ( 8 ) surrounding the process chamber ( 5 ) and including an electric heater ( 15 ), and an electric blower ( 16 ) configured to send a cooling gas into the heating furnace ( 8 ). A control section ( 22 ) executes, in order to converge the process field (A 1 ) to a target temperature, performing power feeding to the heater ( 15 ) to heat up the process field (A 1 ) to a predetermined temperature immediately below the target temperature, and at a time point when the process field (A 1 ) reaches the predetermined temperature, decreasing the power feeding to the heater ( 15 ), and supplying the cooling gas from the blower ( 16 ) to forcibly cool the process field (A 1 ).
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Inventors:
Makoto Nakajima
Takanori Saito
Tsuyoshi Takizawa
Manabu Honma
Takanori Saito
Tsuyoshi Takizawa
Manabu Honma
Application Number:
JP2003432596A
Publication Date:
March 02, 2011
Filing Date:
December 26, 2003
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
F27B5/18; F27D19/00; F27B5/04; F27B17/00; H01L21/22
Domestic Patent References:
| JP3079985A |
Attorney, Agent or Firm:
Nobuo Kinutani
Noriyuki Kanasaka
Noriyuki Kanasaka