Title:
縦型熱処理装置、および被処理体移載方法
Document Type and Number:
Japanese Patent JP3578983
Kind Code:
B2
Inventors:
Shinya Mochizuki
Motoi Akimoto
Motoi Akimoto
Application Number:
JP2000372098A
Publication Date:
October 20, 2004
Filing Date:
December 06, 2000
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C14/50; C23C16/44; H01L21/31; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; H01L21/31
Domestic Patent References:
| JP11163095A | ||||
| JP9289173A | ||||
| JP6227626A |
Attorney, Agent or Firm:
Saichi Suyama