Title:
VERTICAL HEATING DEVICE
Document Type and Number:
Japanese Patent JP3263383
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To attain heating in a short time by increasing efficiency of heating, to shorten a processing time in one cycle by quickening the descending speed of a temperature, to attain the introduction and discharge of a work in a normal temperature, to prolong the service life of a heater, to reduce power consumption, and to prevent the contamination of an outer tube side.
SOLUTION: A vacuum tube 4 is arranged so that an outer tube 9 can be surrounded, and a vacuum space 3 is formed in the vacuum tube 4, and heaters 12 and 13 for heating the outer tube 9 from the surrounding are arranged in the vacuum space 3. Then, a vacuum heat insulating part is formed of the vacuum space 3, so that the heating of the outer tube 9 can be efficiently realized by the heaters 12 and 13 made of graphite arranged in the vacuum space 3. The heaters 12 and 13 arranged in the vacuum space 3 and the outer tube 9 side are sealed airtightly by the vacuum tube 4, so that powder-shaped dusts generated by the heaters 12 and 13 can be prevented from being transmitted to the outer tube 9 side.
Inventors:
Fumio Watanabe
Application Number:
JP27582499A
Publication Date:
March 04, 2002
Filing Date:
September 29, 1999
Export Citation:
Assignee:
Sukegawa Electric Co., Ltd.
International Classes:
H01L21/205; C23C16/46; F27B5/10; H01L21/22; (IPC1-7): H01L21/205; H01L21/22
Domestic Patent References:
| JP7283160A | ||||
| JP4234119A | ||||
| JP63166195A | ||||
| JP5889790A | ||||
| JP63137416A | ||||
| JP4937062B1 | ||||
| JP4615576Y1 | ||||
| JP382078Y1 |
Other References:
【文献】特許3088419(JP,B2)
【文献】特許3100376(JP,B2)
【文献】特許3100376(JP,B2)
Attorney, Agent or Firm:
Kazuyoshi Hojo