Title:
VERTICAL NANO FUSE AND NANO RESISTANCE CIRCUIT ELEMENT
Document Type and Number:
Japanese Patent JP2003162954
Kind Code:
A
Abstract:
To provide a vertical nano circuit comprising a fuse and a resistor, capable of attaining high density.
Vertical nano circuits (100 and 300) are manufactured by such known standard processes as Damascene, wet etching, and reactive etching. So little investment is required other than for acquiring an equipment of latest technology. Thus the vertical nano circuits (100 and 300) are manufactured at a low cost.
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Inventors:
ANTHONY THOMAS C
Application Number:
JP2002273090A
Publication Date:
June 06, 2003
Filing Date:
September 19, 2002
Export Citation:
Assignee:
HEWLETT PACKARD CO
International Classes:
H01H85/00; H01L21/768; H01L23/522; H01L23/525; H01L27/04; (IPC1-7): H01H85/00
Attorney, Agent or Firm:
Kaoru Furuya (3 outside)