VERTICAL STAGE DEVICE - HITACHI CONSTRUCTION MACHINERY

Title:

VERTICAL STAGE DEVICE

Document Type and Number:

Japanese Patent JPH11142557

Kind Code:

A

Abstract:

To provide a vertical stage device for an elevation mechanism using a wedge mechanism improved in following capability of elevation motion of a wedge upper part to horizontal motion of the wedge lower part.

The vertical stage device has a constitution elevating a sample stage 13 in vertical direction and is provided with an elevation wedge mechanism 15 facing in each slope a wedge upper part 15b moving vertically which is provided with a sample stage 13 and guided by a vertical guide 14d to a wedge lower part 15a freely movable in horizontal direction with a motor 17. Here, the wedge upper part 15b is connected with connectors 24, 25 and 26 to the wedge lower part 15b. When the wedge lower part 15a is moved in horizontal direction, the wedge upper part 15b is elevated so as not to make a gap between the wedge lower part 15a and the wedge upper part 15b.

Inventors:

SHIRAI TAKASHI
MURAYAMA TAKESHI
ONOZATO AKIMASA
MORIMOTO TAKASHI
KURODA HIROSHI

Application Number:

JP32524697A

Publication Date:

May 28, 1999

Filing Date:

November 11, 1997

Export Citation:

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Assignee:

HITACHI CONSTRUCTION MACHINERY

International Classes:

G12B5/00; B66F7/06; G01N37/00; G01Q10/04; G01Q90/00; G02B21/26; G05D3/00; (IPC1-7): G12B5/00; B66F7/06; G01N37/00; G02B21/26; G05D3/00

Attorney, Agent or Firm:

Tamiya HiroshiKeisuke

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