Vertical thermal treatment equipment, a heat treating method, and a storage

Title:

Vertical thermal treatment equipment, a heat treating method, and a storage

Document Type and Number:

Japanese Patent JP6237264

Kind Code:

B2

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Inventors:

Shigeru Nakajima
Hiromi Shima
Yusuke Tateno

Application Number:

JP2014011428A

Publication Date:

November 29, 2017

Filing Date:

January 24, 2014

Export Citation:

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Assignee:

東京エレクトロン株式会社

International Classes:

H01L21/31; C23C16/455; C23C16/46; H01L21/02; H01L21/324

Domestic Patent References:

JP2013021333A
JP2008244443A
JP2009536460A
JP2012142421A
JP8088192A
JP2008172061A

Attorney, Agent or Firm:

Toshio Inoue

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