Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
VESSEL FOR EVAPORATING SOURCE
Document Type and Number:
Japanese Patent JPS6017071
Kind Code:
A
Abstract:

PURPOSE: To improve the using rate of a melt and to improve durability of a vessel for an evaporating source of an electron beam heating type by specifying the sectional shape of the containing part of said vessel.

CONSTITUTION: The side wall surface 3' in the containing part of a vessel for an evaporating source where a molten metal is held has a taper divergent toward the opening and the base 4' in the containing part is constituted of a curved surface projecting downward. Whether the curvature R thereof is single or plural is not a decisive factor and the preferable form is such that the tapered part is connected with the approximately smoothly curved surfaces from the terminal end thereof. The tapering angles β and γ of the surface 3' may be equal but are more preferably asymmetrical in the case of using the accelerated electron by an electron gun of a coaxial type.


Inventors:
SHINOHARA KOUICHI
Application Number:
JP12241884A
Publication Date:
January 28, 1985
Filing Date:
June 14, 1984
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
C23C14/24; C23C14/30; (IPC1-7): C23C14/28
Domestic Patent References:
JPS49119663A1974-11-15
JP39021927A
JPS51151684A1976-12-27
Attorney, Agent or Firm:
Toshio Nakao



 
Previous Patent: Slot machine

Next Patent: SPUTTERING METHOD