Title:
振動型微小機械角速度センサ
Document Type and Number:
Japanese Patent JP2010540949
Kind Code:
A
Abstract:
The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (1), (2), (3), (4), (22), (24) in such a way, that the coupling from one mode of motion to another, conveyed by the spring (1), (2), (3), (4), (22), (24), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.
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Inventors:
Clemetti, Petri
Nera, Kaisa
Lipsanen, Ante
Bronckvist, Ansi
Tokeri, Alti
Nera, Kaisa
Lipsanen, Ante
Bronckvist, Ansi
Tokeri, Alti
Application Number:
JP2010527479A
Publication Date:
December 24, 2010
Filing Date:
September 29, 2008
Export Citation:
Assignee:
VTI Technologies Owai
International Classes:
B81B3/00; B81C1/00; G01C19/5712; H01L29/84
Domestic Patent References:
| JP2002540406A | 2002-11-26 | |||
| JP2000155030A | 2000-06-06 | |||
| JP2002524698A | 2002-08-06 | |||
| JP2006317242A | 2006-11-24 |
Attorney, Agent or Firm:
▲吉▼川 俊雄