PURPOSE: To accurately and easily adjust the resonance frequency in the vibrating element used for the gyros and resonators.
CONSTITUTION: In a vibrating element 1 where a vibrator 2 is vibrated, being supported beam by a 3, a shape memory member 6 with electrodes 7 and 8 for energizing heating is fixed on both surfaces of a shape memory member 5 which extends or shrinks into the stored shape when it is heated is fixed to the surface of the beam 3. when the resonance frequency of the vibrating element 1 is deviated from the set resonance frequency, the shape memory member 5 is deformed into the shape stored by the energizing heating. The power is applied in the direction of correcting the deviation of the resonance frequency on the beam 3. Thus, the resonance frequency of the vibrating element 1 is adjusted.
TOYAMA MOTOO
INOUE KAZUHIRO
