To provide a vibrating gyro having a PZT thin-film bimorph structure which can readily provide a number of bimorph structures, can be formed into a small bimorph structure, and resists twisting.
A vibrating gyro 1 comprises a pair of parallel flat-plate structures 2, 3 connected in series along the vertical direction. The parallel flat plate structure 2 comprises flat plate-shaped piezoelectric elements 4 constructed of a pair of bimorph structures opposed and secured to each other with an adhesive, with prism-shaped insulating spacers 5 sandwiched between the upper and lower ends thereof. Each of the piezoelectric elements 4 has a PZT thin film 7 formed on each side of a base 6 made from titanium into a flat plate shape of uniform thickness, with an electrode film 8 formed bn the PZT thin film 7 on each side. The parallel flat plate structures 2, 3 are placed in such a way that the sides on which the electrode films 8 are formed are perpendicular to each other, and are bonded together with an adhesive at their upper and lower end faces.
ARAI FUMITO
ITOIGAWA KOICHI
IWATA HITOSHI
ARAI FUMITO
TOKAI RIKA CO LTD