To provide a vibrating MEMS switch for performing a stable switching operation even in applying of a low voltage by turning on/off the MEMS switch using a resonating phenomenon.
The MEMS switch includes a vibrator vibrating in a prescribed direction by applying an AC voltage and a stationary contact formed at a position separated by a prescribed distance along with a vibration direction of the vibrator. When a DC voltage of a prescribed value is applied to the fixed contact, a vibration amplitude of the vibrator is increased to contact with the stationary contact then the MEMS switch is turned on. On the other hand, it is preferable for the MEMS switch to mutually joint a prescribed first substrate and a second substrate by sandwiching the vibrator therebetween and to isolate the vibrator in a sealed space in a vacuum state.
PARK TAE-SIK
JEONG HEE-MOON
Tomoko Inazumi
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