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Title:
VIBRATION ACTUATOR UNIT, STAGE DEVICE AND OPTICAL DEVICE
Document Type and Number:
Japanese Patent JP2014023360
Kind Code:
A
Abstract:

To provide a vibration actuator unit which can drive a driven object in a different moving direction.

The vibration actuator unit includes an electromechanical conversion element for converting an electrical vibration of a driving voltage applied into a mechanical vibration, and a contact portion which comes into contact with the driven surface of a driven object and transmits the mechanical vibration of the electromechanical conversion element as a driving force to the driven surface. The electromechanical conversion element vibrates the contact portion in a first vibration surface by bending periodically in the first vibration surface intersecting the driven surface, and vibrates the contact portion in a second vibration surface by bending periodically in the second vibration surface intersecting the first vibration surface.


Inventors:
KUSANO MASAAKI
MATSUKAWA EIJI
Application Number:
JP2012161999A
Publication Date:
February 03, 2014
Filing Date:
July 20, 2012
Export Citation:
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Assignee:
NIKON CORP
International Classes:
H02N2/00
Domestic Patent References:
JPH07184382A1995-07-21
JP2006261141A2006-09-28
Attorney, Agent or Firm:
Longhua International Patent Service Corporation