Title:
VIBRATION DAMPING DEVICE OF MOVING BODY TO BE GUIDED BY LINEAR ROLLING GUIDE DEVICE
Document Type and Number:
Japanese Patent JPH06106433
Kind Code:
A
Abstract:
PURPOSE: To execute the guidance of a moving body by a linear rolling guide device where the adjustment between a liquid bath and a slider is possible.
CONSTITUTION: The vibration of a track fixed to a bed 1 and a column 7 connected to a bearing of a linear guide device constituted by a bearing which is slidably supported by this track is damped by providing a liquid bath 14 arranged on the bed 1 in parallel with the track and an elastically deformable slider block 16 on the column so that a part may be immersed in the viscous liquid 15 to be supplied to the liquid bath 14, and thereby executing the elastic deformation of the slider block 16 by a bolt 17 penetrating the bottom surface of the column 7.
Inventors:
TANAKA SHINJI
Application Number:
JP25447492A
Publication Date:
April 19, 1994
Filing Date:
September 24, 1992
Export Citation:
Assignee:
HITACHI SEIKO KK
International Classes:
B23Q1/26; B23Q1/40; F16F9/10; F16F15/02; F16F15/023; (IPC1-7): B23Q1/26; F16F9/10; F16F15/02
Previous Patent: A resist composition, a resist pattern formation method, a high molecular compound
Next Patent: SPECIMEN HOLDING DEVICE
Next Patent: SPECIMEN HOLDING DEVICE