PURPOSE: To improve reliability of measured values, by accommodating an optical lens and an photoelectric conversion element in the same case for a shape measuring device, detecting the amount of movement of an image forming point of a light emitting body, determining the adoption or non-adoption of the measured data, and correcting the measured data by the amount of vibration.
CONSTITUTION: A light emitting body 2 is fixed to a part, which forms a unitary body together with a table, on which a thick plate 1 to be measured is mounted. The image of the light emitted from the light emitting body 2 is formed by an optical lens 3. A device includes a two-dimensional semiconductor position detector 4, which is provided at the image forming plane. The lens 3 and the detector 4 are accommodated in a same case 5 for a shape measuring device. A signal processing means 6 processes the signal from the detector 4 and detects the position of the light emitting body 2. When the table, on which the body to be measured 1 is mounted, or the case 5 is vibrated, the image forming point of the light emitting body is changed. The change is detected by the detector 4. Based on the magnitude of the detected output of the detector 4, adoption or non-adoption of the measured data is determined. When the data is adopted, the measured data is corrected by the amount of vibration. Thus the reliability of the measured data can be improved.
MORI YOSHIICHI
NAKAZATO HIDEO
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