Title:
VIBRATION DEVICE AND ELECTRONIC APPARATUS
Document Type and Number:
Japanese Patent JP2012142666
Kind Code:
A
Abstract:
To provide a vibration device having a vibrator which reduces unnecessary vibration modes and is efficiently driven.
A vibrator 2 of a vibration device 1 has a base part 27, two vibration arms 28, 29 provided so as to extend from the base part 27 in a Y-axis direction and be lined up in an X-axis direction that intersects the Y-axis direction, and excitation electrodes 221, 222, 223, 224, 231, 232, 233, 234 exciting the vibration arms 28, 29 through energization. Multiple fine holes, penetrating in the thickness direction, are formed in parts of the excitation electrodes 221, 222, 231, 232, and vibration characteristics of the vibration arms 28, 29 are adjusted by those holes.
Inventors:
YAMAZAKI TAKASHI
Application Number:
JP2010292042A
Publication Date:
July 26, 2012
Filing Date:
December 28, 2010
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H03H9/19; H01L41/09; H01L41/18; H01L41/22; H01L41/253; H01L41/29; H01L41/311; H01L41/39; H03B5/32; H03H9/17
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka
Osamu Suzawa
Kazuhiko Miyasaka
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