Title:
振動素子、振動デバイス、発振器、電子機器および移動体
Document Type and Number:
Japanese Patent JP7367311
Kind Code:
B2
Abstract:
A resonator element includes a quartz crystal substrate including a supporting section, a resonating section, and a coupling section coupling the supporting section and the resonating section and having thickness smaller than the thickness of the supporting section, the supporting section including a first principal plane and a first side surface coupling the first principal plane and the coupling section, a first excitation electrode disposed in the resonating section, a second excitation electrode disposed in the resonating section and overlapping the first excitation electrode via the resonating section, and first and second pad electrodes including portions disposed on the first principal plane, the first and second pad electrodes being electrically coupled to the first and second excitation electrodes.
Inventors:
Shinya Aoki
Byung Gaku Yanagi
Atsushi Matsuo
Byung Gaku Yanagi
Atsushi Matsuo
Application Number:
JP2019036530A
Publication Date:
October 24, 2023
Filing Date:
February 28, 2019
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H03H9/19
Domestic Patent References:
| JP2013162265A | ||||
| JP2014175880A | ||||
| JP2016040950A | ||||
| JP2016105581A | ||||
| JP2018093551A | ||||
| JP2013026630A | ||||
| JP2013093654A | ||||
| JP2017050751A |
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuo Asahi
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