Title:
VIBRATION-FREE PEDESTAL EVALUATING DEVICE
Document Type and Number:
Japanese Patent JP2009162707
Kind Code:
A
Abstract:
To provide a vibration-free pedestal evaluating device for easily performing a performance evaluation test of a vibration-free pedestal.
The static load equivalent to own weight of a precision apparatus body is charged on a support 10 simulating the vibration-free pedestal 1 by an energizing force due to contraction of a coil spring 13. A dummy weight 20 equivalent to the mass of the precision apparatus body is mounted on a table 21 horizontally movably. The dummy weight 20 is coupled to the support 10 via coupling rods 23, 26 and 29 and a turning device 30.
Inventors:
Hakoda, Fumihiko
Application Number:
JP2008000002832
Publication Date:
July 23, 2009
Filing Date:
January 10, 2008
Export Citation:
Assignee:
NIKON CORP
International Classes:
G01M7/02; G01M7/00