VIBRATION PIECE, MANUFACTURING METHOD OF VIBRATION PIECE, VIBRATOR, ELECTRONIC DEVICE, ELECTRONIC EQUIPMENT AND MOBILE BODY

Title:

VIBRATION PIECE, MANUFACTURING METHOD OF VIBRATION PIECE, VIBRATOR, ELECTRONIC DEVICE, ELECTRONIC EQUIPMENT AND MOBILE BODY

Document Type and Number:

Japanese Patent JP2014021038

Kind Code:

A

Abstract:

To provide a vibration piece capable of preventing a temperature drift caused by the difference in size and mass of weight layers of drive vibration arms extended in mutually opposite directions.

A gyro element 2 as a vibration piece includes: a pair of first and second drive vibration arms 441 and 442 extended in mutually opposite directions from a base part 41; first weight parts 12a and 12b provided in a first region of at least one of the drive vibration arms, with an interval from the tip of at least one of the first and the second drive vibration arms to the base part side; and second weight parts 11a and 11b provided in a second region which is a region between the tip of the first weight part and the tip of at least one of the drive vibration arms. When the area of the first region is defined as A1, the mass of the first weight part is defined as B1, the area of the second region is defined as A2 and the mass of the second weight part is defined as B2, B1/A1>B2/A2 is satisfied.

Inventors:

YAMAGUCHI KEIICHI
OGURA SEIICHIRO
KIKUCHI TAKAYUKI
NISHIZAWA RYUTA
OSAWA SEIJI

Application Number:

JP2012162384A

Publication Date:

February 03, 2014

Filing Date:

July 23, 2012

Export Citation:

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Assignee:

SEIKO EPSON CORP

International Classes:

G01C19/5628; H01L41/08; H01L41/18; H01L41/22

Domestic Patent References:

JP2007071706A	2007-03-22
JP2011155629A	2011-08-11
JP2008160824A	2008-07-10
JP2008151633A	2008-07-03
JP2008301111A	2008-12-11

Attorney, Agent or Firm:

Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka

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