PURPOSE: To enable to lower vibration and determine the position of high accuracy by forming an elastic body of a gum material with its cross section rectangular formed and extending in the longitudinal direction and constructing such that the supporting spring rigidity in the horizontal direction is smaller than the one in the vertical direction and the supporting spring rigidity is differed on two axis within the horizontal surface.

CONSTITUTION: An elastic body is formed of a rubber material 1a with its cross section rectangular formed and extending in the longitudinal direction and is constructed such that the supporting spring rigidity in its horizontal direction is smaller than the one in the vertical direction and the supporting spring rigidity is thus differed on two axis within the horizontal surface. A thin plate beam like rubber material 1a is bonded and held at a holding board 2 for integrally holding these rubber materials up and down respectively at the adequate pitches within the same flat surface, and only the adequate number of layers are piled up and integrally bonded. This integral bonded body is inserted between a load receiving board 3 for supporting the device weight and an installed floor 4. When the XY stage step driving force acts on the thus constructed device, the shear resistance dominates the spring rigidity in the long- side direction of the rubber material 1a in the horizontal direction and its viscosity acts as a damping element.