PURPOSE: To cancel relative displacement caused by fine vibration between a plurality of points spaced by a distance from each other.

CONSTITUTION: A plurality of foundation parts 6 spaced by a distance from each other, vibration resistant stands 3 supported on the foundation parts 6 through support stands 4, displacement sensors for detecting the three- dimensional displacement of the stand 3, actuators attached between the support stand 4 and vibration resistant stand 3 to move the vibration resistant stand three-dimensionally and devices 1, 2 disposed on the vibration resistant stands 3 to be released from vibration are provided. The three-dimensional displacement of the respective vibration resistant stands is detected by the displacement sensors and the actuators are driven by signals of the sensors so that the three- dimensional displacement in devices to be released from vibration is controlled to coincide with each other.