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Patent Searching and Data


Title:
VIBRATION SENSOR FOR FLUID AND FLOW DETECTOR
Document Type and Number:
Japanese Patent JPH0972767
Kind Code:
A
Abstract:

To detect flow rate with high accuracy for a long term using a vibration sensor for fluid which can sustain the detection characteristics for a long term without requiring any adjustment.

The flexure detecting section 6 of a flexure detecting means 8 magnetically detects the flexure of a magnetic membrane 5 caused by the pressure P1 of a fluid introduced into a first pressure chamber 3 and the pressure of a fluid introduced into a second pressure chamber 4 and a signal converting section 7 outputs an electric detection signal SD corresponding to the detected flexure of magnetic membrane 5. Since the signal converting section 7 is not exposed directly to the fluid, corrosion of the electric system is retarded and since a magnetic membrane is employed for detecting the flexure, fluctuation in the characteristics is suppressed thus suppressing the aging and providing a sensor suitable for long term use. Furthermore, the flexure detecting section 6 has low electric impedance and insusceptible to electric noise thus ensuring high reliability and a flow detector employing the flexure detecting section 6 can detect the flow rate with high reliability for a long term.


Inventors:
MIYAZAKI YOSHIRO
Application Number:
JP22795195A
Publication Date:
March 18, 1997
Filing Date:
September 05, 1995
Export Citation:
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Assignee:
YAZAKI CORP
International Classes:
G01F1/20; G01L13/06; (IPC1-7): G01F1/20; G01L13/06
Attorney, Agent or Firm:
Hideo Takino (1 outside)