Title:
VIBRATOR, MANUFACTURING METHOD OF THE SAME, OSCILLATOR, ELECTRONIC APPARATUS AND MOVABLE BODY
Document Type and Number:
Japanese Patent JP2015088812
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a vibrator which is small in size and low in height and is obtained by causing heights of connections among electrodes of a vibration piece and terminals of a base substrate to be lowered in a narrow region.SOLUTION: A vibrator 3 comprises: a first substrate 51 provided with internal terminals 32 and 34 on one surface thereof; a base portion 12 provided with connection electrodes 43a and 43b; vibration arms 20 and 22 which extend from the base portion 12 and are provided with excitation electrodes 41a and 41b connected to the connection electrodes 43a and 43b; a vibration piece 2 connected to the one surface of the first substrate 51 by a bonding member 35; and a bonding wire 80 connected to the internal terminals 32 and 34 across the connection electrode 43a. Parts of the bonding wire 80 across the connection electrode 43a are connected to the connection electrode 43a.
Inventors:
KOYAMA YUGO
Application Number:
JP2013223976A
Publication Date:
May 07, 2015
Filing Date:
October 29, 2013
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H03H9/10; H03B5/32; H03H3/02; H03H9/02; H03H9/19; H03H9/215
Attorney, Agent or Firm:
Masahiko Ueyanagi
Kazuaki Watanabe
Kazuaki Watanabe