Title:
VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND MOBILE BODY
Document Type and Number:
Japanese Patent JP2014220731
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a vibrator in which a vibration loss due to resonance is restrained.SOLUTION: The vibrator comprises: a substrate; an electrode part having a first electrode and a second electrode provided on one face of the substrate; a vibration part having a first vibration body isolated from the first electrode and extending from a base so that one part thereof is overlaid, and a second vibration body isolated from the second electrode and extending from the base in a direction crossing with a direction in which the first vibration body extends so that one part thereof is overlaid; a support part having a beam part extending from the base; a fixing part provided on the second electrode and connected to the support part; a first crossing part connected to the fixing part at both ends, isolated from the first electrode, and provided so that one part thereof is overlaid; and a second crossing part connected to the first electrode at one end, isolated from the second electrode, and provided so that one part thereof is overlaid. The vibrator has a difference between a vibration frequency of the vibration part and a resonance frequency of the first crossing part and the second crossing part.
Inventors:
NAGATA KAZUYUKI
YAMADA AKINORI
YAMADA AKINORI
Application Number:
JP2013099938A
Publication Date:
November 20, 2014
Filing Date:
May 10, 2013
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H03H9/24; B81B3/00
Attorney, Agent or Firm:
Masaaki Kamiyanagi
Kazuhiko Miyasaka
Kazuaki Watanabe
Kazuhiko Miyasaka
Kazuaki Watanabe
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