To easily produce a vibrator, to decrease the production cost and to improve the mass-productivity by bonding piezoelectric element to one or both surfaces of an elastic plate, attaching a feeder to the electrode formed on the surface of the piezoelectric element, and covering the outer surface including the peripheral part of the piezoelectric element with a UV-curing resin or the like.
This vibrator 11 used for a piezoelectric carrying device and the like has a unimorph or bimorph structure having a piezoelectric element 13 adhered to one or both surfaces of an elastic plate 12. A feeder 15 is attached to the electrode 16 on the surface of the piezoelectric element 13. When the vibrator has a bimorph structure, the feeder 15 is attached in such a manner that the outer electrodes of the piezoelectric elements 13 are in the same potential. The outer surface including the peripheral part of the piezoelectric element 13 is coated with a coating layer 14 comprising either of a UV-curing resin essentially comprising a modified acrylate or an epoxy resin elastic adhesive. Thus, the vibrator 11 is obtd. By this method, the coating layer 14 can be easily formed and the mass-productivity of the vibrator 11 is improved.
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