To provide a dust remover which performs dust removing while conveying an article such as a mat and is compact and can be freely transferred to any place and is easy to maintain.
A hurdle 35 arranged in an middle part of a hammer 31 vibrates with the h hammer by a vibrating action generated by a vibratory motor 32 mounted on the hammer of a dust removal part J. This vibration is transmitted to the mat M which is conveyed, by being pinched between circular belts 19 and 20 rotating four pairs of conveying rollers 14a and 14b to 17a and 17b mounted at a conveying part H. The dust entrapped among piles in the mat M, is removed, falls into a chute 61 of a bracket part, passing through the grooves 37 of the hurdle 35 and is collected into a dust box.
Next Patent: ステージ装置、露光装置及び露光方法、並びにデバイス製造方法