Title:
Viewing device
Document Type and Number:
Japanese Patent JP6131204
Kind Code:
B2
Abstract:
The present application relates to an observation apparatus comprising a structured illumination section that emits structured illumination light having a light-dark pattern; a phase difference measurement illumination section that emits illumination light for phase difference measurement onto a subject-mount surface; a phase contrast lens that has a phase plate for dimming illumination light for phase difference measurement, where the illumination light for phase difference measurement having passed through the subject-mount surface is incident into the phase contrast lens, and the structured illumination light is incident into the phase contrast lens in a direction different from a direction of incidence of the illumination light for phase difference measurement through an optical system; a detection section that detects reflected light of the structured illumination light which is reflected on the subject-mount surface; and an observation section that images the illumination light for phase difference measurement which has passed through the phase contrast lens. According to the invention, the phase plate has frequency characteristics in which a transmittance of the structured illumination light is higher than a transmittance of the illumination light for phase difference measurement.
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Inventors:
Kenbara Matsubara
Application Number:
JP2014037830A
Publication Date:
May 17, 2017
Filing Date:
February 28, 2014
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G02B21/14; G02B21/06
Domestic Patent References:
| JP2275918A |
Attorney, Agent or Firm:
Yanagita Seiji
Go Sakuma
Go Sakuma
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