To provide a method for producing a polycyclic olefin polymer usable for photoresist compositions.
The method for producing a polycyclic olefin polymer includes (a) combining a monomer composition containing polycyclic olefin monomers, a non-olefinic chain transfer agent and an activator compound, to form a mixture; (b) heating the mixture; and (c) adding a polymerization catalyst containing Ni and/or Pd. The non-olefinic chain transfer agent includes one or more compounds selected from the group consisting of H2, alkylsilanes, alkylalkoxysilanes, alkylgermanes, alkylalkoxygermanes, alkylstannanes, and alkylalkoxystannanes. The activator has an active hydrogen having a pKa of at least 5. The resulting polycyclic olefin polymers can be used in photoresist compositions.
BARNES DENNIS A
BELL ANDREW
BENNETT BRIAN K
CHANG CHUN
LIPIAN JOHN-HENRY
WU XIAOMIN
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Takumi Terachi