PURPOSE: To easily inspect a substrate to be inspected for its electronic component mounting state with high accuracy by scanning a detecting means based on required information of NC data used for mounting electronic components and mounting component data.
CONSTITUTION: A substrate 14 to be inspected mounted with electronic components 15 is placed on the base 13 of an inspecting section 11. A control section 12 first fetches inspection information, such as the kind, mounting direction, etc., of the component 15 from NC data for mounting the component 15 on the substrate 14 and mounting parts data. A scanning position calculating circuit calculates the scanning position of the component 15 from the inspection information and a scanning signal output circuit scans a detecting means 18 by controlling the X- and Y-axis robots 16 and 17 of the section 11 based on the calculated scanning position. The means 18 receives the reflected light of irradiating light and detect the displacement by using the trigonometrical distance measuring method and outputs the displacement to the discrimination circuit of the control section 12. The discrimination circuit inspects the presence/ absence, positional deviation, etc., of the component 15. Therefore, an inexpensive but highly accurate substrate appearance inspecting device from which the amount of preparatory work is remarkably reduced can be obtained.
NAKATSUKA SHIGEKI
MORIOKA MANABU
SHIGA KAZUHIRO
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