Title:
Visual inspection equipment
Document Type and Number:
Japanese Patent JP6322335
Kind Code:
B2
Abstract:
Inclined cameras 31b-31e are arranged at an incline with respect to the normal direction (vertical direction Z) to the surface 10a of a substrate 10, the inclined cameras 31b-31e being suited for capturing the side surface of solder 91, 92 present on the surface 10a of the substrate 10 (Fig. 7). The three-dimensional shape Dt(I) of a measurement region R(I) is measured on the basis of a measurement region R(I) in which the measurement region R(I) set with respect to the substrate is imaged by the inclined cameras 31b-31e. Therefore, even when the measurement region R(I) is set so as to include side surfaces 91a, 92a of the solder 91, 92 present on the substrate 10, it is possible to accurately measure the three-dimensional shape Dt(I) of the side surfaces 91a, 92a of the solder 91, 92.
Inventors:
Nobuaki Tabata
Application Number:
JP2017512487A
Publication Date:
May 09, 2018
Filing Date:
April 14, 2015
Export Citation:
Assignee:
YAMAHA HATSUDOKI KABUSHIKI KAISHA
International Classes:
G01B11/25
Domestic Patent References:
| JP2005049221A | ||||
| JP2000236200A | ||||
| JP2010091570A | ||||
| JP2014510276A |
Foreign References:
| US20110050893 |
Attorney, Agent or Firm:
Kakusho Shoichi
Kazumasa Onishi
Kazumasa Onishi