Title:
外観検査装置及び外観検査方法
Document Type and Number:
Japanese Patent JP5566707
Kind Code:
B2
Inventors:
Hideaki Tanaka
Chiya Shinya
Chiya Shinya
Application Number:
JP2010009342A
Publication Date:
August 06, 2014
Filing Date:
January 19, 2010
Export Citation:
Assignee:
Saki Corporation Co., Ltd.
International Classes:
G01B11/00; G01B11/25; G01N21/956; H05K13/08
Domestic Patent References:
JP2009115479A | ||||
JP4248405A | ||||
JP2002107126A | ||||
JP2003035517A | ||||
JP7043124A | ||||
JP2006049348A | ||||
JP2002286430A | ||||
JP5280945A |
Attorney, Agent or Firm:
Sakaki Morishita
Takeshi Aoki
Takeshi Aoki