Title:
外観検査方法および外観検査装置
Document Type and Number:
Japanese Patent JP4105809
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a method and an apparatus in which an inspection can be performed with good efficiency by a constitution wherein an image is detected at a low magnification (a low resolution) for an inspection processing operation and, at the same time, the image can be detected also at a high magnification required for a defect sorting operation. SOLUTION: Detection light which is received by a detector 7A is converted into a digital image signal by an A/D converter 8 so as to be input to a defect detection part 23. In the detection part 23, input data from the converter 8 is compared with data for comparison with it, and the existence of a defect is judged. That is to say, in the detection part 23, data which is generated by a design-data-pattern generation circuit on the basis of design data is compared with the input data from the converter 8, or data which is fetched in a previous scanning region so as to be stored in an image storage circuit is compared with the input data from the converter 8, and the defect is judged. Defect image information and coordinate information which are retained are displayed on a CRT 32 by a computer 32 for defect-information editing. By using their display, an operator can sort the defect.
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Inventors:
Kenji Oka
Shunji Maeda
Minoru Noguchi
Hidetoshi Kenbo
Shunji Maeda
Minoru Noguchi
Hidetoshi Kenbo
Application Number:
JP25393498A
Publication Date:
June 25, 2008
Filing Date:
September 08, 1998
Export Citation:
Assignee:
Renesas Technology Corp.
International Classes:
G01N21/88; G01B21/30; H01J37/22; G01N13/10; G01N21/93; G01N21/94; G01N21/95; G01N21/956; G03F1/84; G06T1/00; G06T7/00; H01L21/66
Domestic Patent References:
| JP5034293A | ||||
| JP10325803A | ||||
| JP10300448A | ||||
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Foreign References:
| WO1997035162A1 |
Attorney, Agent or Firm:
Kenjiro Take