Title:
【発明の名称】タ-ボ真空ポンプ
Document Type and Number:
Japanese Patent JPH0610477
Kind Code:
B2
Inventors:
OKAWADA TAKESHI
MASE MASAHIRO
UEDA SHINJIRO
SAKAGAMI SEIJI
YANO ISAO
MASE MASAHIRO
UEDA SHINJIRO
SAKAGAMI SEIJI
YANO ISAO
Application Number:
JP11465587A
Publication Date:
February 09, 1994
Filing Date:
May 13, 1987
Export Citation:
Assignee:
HITACHI LTD
International Classes:
F04D19/04; F04D23/00; (IPC1-7): F04D19/04; F04D23/00
Domestic Patent References:
| JP61247893A | ||||
| JP6187996A | ||||
| JP6131695A |
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)
Next Patent: ウオ−タポンプ