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Title:
VOLTAGE CONTROLLED VARIABLE CAPACITOR ELEMENT
Document Type and Number:
Japanese Patent JP2004214408
Kind Code:
A
Abstract:

To provide a voltage controlled variable capacitor that can be its manufactured without changing the conventional manufacture process, or adding any new process, preventing the circuit from being largely scaled or integrated into a high voltage, preventing the maximum value and minimum value of the capacitance per the unit area of an electrode from being fluctuated, and arbitrarily selecting high frequency C-V characteristics.

The surface of a p-type substrate 1 is formed with varactor elements 13 and 14. In the varactor element 13, the surface of the p-type substrate 1 is formed with an N well 2, and a gate insulating film 6 is formed on the N well 2, and an n-type polysilicon layer 4 is formed on the gate insulating film 6. Also, in the varactor element 14, the surface of the p-type substrate 1 is formed with an N well 2, and the gate insulating film 6 and the p-type polysilicon layer 5 are formed on the N well 2. Then, the n-type polysilicon layer 4 and the p-type polysilicon layer 5 are connected to a gate terminal 7, and the N well 2 is connected through a P+-diffuse layer 3 to an SD terminal 8. The work functions of the n-type polysilicon layer 4 and the p-type polysilicon layer 5 are made different from each other.


Inventors:
KUROSAWA SUSUMU
FUJIMOTO HIROKI
Application Number:
JP2002382285A
Publication Date:
July 29, 2004
Filing Date:
December 27, 2002
Export Citation:
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Assignee:
NEC ELECTRONICS CORP
International Classes:
H01G7/06; H01G7/00; H01L21/822; H01L21/8234; H01L27/04; H01L27/06; H01L27/08; H01L29/93; H01L29/94; (IPC1-7): H01L21/822; H01G7/06; H01L21/8234; H01L27/04; H01L27/06
Attorney, Agent or Firm:
Masanori Fujimaki