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Title:
VORTEX FLOW MOLECULAR PUMP
Document Type and Number:
Japanese Patent JPS63306297
Kind Code:
A
Abstract:

PURPOSE: To promote the orientation of a pump to high pressure ratio, by dividing the inside of a main flow path of the pump into plural parts by internal guide plates, which reduce a flow speed component in the rotary direction, and providing separate spaces.

CONSTITUTION: A plurality of internal guide plates 15, which reduce a flow speed component in the rotary direction of an impeller 9, are arranged. Gas, while it performs a helical motion in the peripheral direction in a housing 4 by the rotary action of the impeller 9, is fed to be transferred reaching a delivery port 13. The gas, while its flow is forcedly changed in a direction of reducing the flow speed component by the internal guide plates 15, increases the pressure at each time, and the gas, in a condition that its distance advancing in the peripheral direction decreases shorter during one turn in the housing 4, is guided by a guide member 14 being compressed in stages. Accordingly, the orientation of a pump to high pressure ratio can be attained by increasing the number of boost times.


Inventors:
KINOSHITA KANJIRO
Application Number:
JP14277087A
Publication Date:
December 14, 1988
Filing Date:
June 08, 1987
Export Citation:
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Assignee:
DAIKIN IND LTD
International Classes:
F04D19/04; F04D23/00; (IPC1-7): F04D19/04; F04D23/00
Domestic Patent References:
JPS49120207A1974-11-16
JP46039385A
Attorney, Agent or Firm:
Hiroshi Maeda



 
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