Title:
WAFER BASKET, AND METHOD AND APPARATUS FOR INSPECTING WAFER BASKET
Document Type and Number:
Japanese Patent JP3728760
Kind Code:
B2
Abstract:
PURPOSE: To obtain an inspection apparatus for wafer basket in which the pocket pitch can be modified, as required, and a deteriorated supporting member can be replaced by employing a composite structure of the supporting member and a framework member.
CONSTITUTION: The inspection apparatus for water basket has such structure as a member 1 for supporting a wafer 6 arranged with pockets 1a is hooked detachably to a framework member 2 having shoe type frame structure so that the supporting member 1 can be replaced by one having different pocket pitch, as required. A detecting means comprising a light emitting part and a light receiving part irradiates the inner wall of the pocket 1a in an existing supporting member 1 and detects the reflected light which is then compared with a measurement of an unused supporting member. If the pocket 1a is scratched and dust may be produced, the supporting member 1 is replaced by an unused one.
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Inventors:
Yamagata High Wide
Kazuhiro Ishikawa
Yuriho
Kazuhiro Ishikawa
Yuriho
Application Number:
JP24529794A
Publication Date:
December 21, 2005
Filing Date:
October 11, 1994
Export Citation:
Assignee:
富士通株式会社
International Classes:
H01L21/68; H01L21/02; H01L21/673; (IPC1-7): H01L21/68; H01L21/02
Domestic Patent References:
| JP4070750U | ||||
| JP6026262U | ||||
| JP1060541U |
Attorney, Agent or Firm:
Junichi Yokoyama