Title:
ウェハボートの製造方法
Document Type and Number:
Japanese Patent JP7150567
Kind Code:
B2
Abstract:
To perform chamfering to a rear end side (root side) of the peripheral edge of a wafer mounting surface to suppress the occurrence of slips and the like due to stress concentration in a wafer boat equipped with a long wafer support portion.SOLUTION: A vertical wafer boat 1 includes a top plate 3, a plurality of columns 2 having one end fixed to the top plate and the other end fixed to a bottom plate 4, and a wafer support portion 2a protruding horizontally from the side surface of the column, and the wafer support portion has a polished wafer mounting surface 2a1, and U-shaped edge portions 2a2 and 2a3 in a plan view formed at the peripheral edge of the wafer mounting surface, and the edge portion is in a state in which chamfering is continuously performed from one end of the U-shape starting from the side surface of the column to the other end ending at the side surface of the column.SELECTED DRAWING: Figure 2
Inventors:
Seiho Liang
Kimura Tomokazu
Makoto Abe
Kimura Tomokazu
Makoto Abe
Application Number:
JP2018209398A
Publication Date:
October 11, 2022
Filing Date:
November 07, 2018
Export Citation:
Assignee:
CoorsTek Co., Ltd.
International Classes:
H01L21/324; H01L21/205; H01L21/22; H01L21/31; H01L21/683
Domestic Patent References:
| JP2018104737A | ||||
| JP2001168175A | ||||
| JP2008277781A | ||||
| JP2001176811A |
Foreign References:
| WO2005104204A1 |
Attorney, Agent or Firm:
Shigeru Kinoshita
Yuko Sawada
Yuko Sawada